x ray orientation for single crystal silicon wafer and ingot
x ray orientation for single crystal silicon wafer and ingot
x ray orientation for single crystal silicon wafer and ingot
for single crytal ingot/wafer
A,C,R,M plane
automatic orienation
quick plane detecting
data can be saved and output
YX-Z Automatic Peak-Searching
X-ray Orientation Instrument
Functions:
X-ray automatic orientation instrument is a kind of accurate device which deigned integrates light, mechanical, electrical into one body according to X-ray diffraction principle, it can fast measure crystal direction of natural and artificial crystal(including piezoelectric, optic, laser, semiconductor), it can also use with cutter, grinder and other equipments. YX series X-ray orientation instrument is necessary device for precision process and manufacture crystal component, it can be used for orientation of all kinds of crystal and is broadly used in crystal material processing industry.
Features:
1. PLC control technology is used. It is highly automated with low failure rate and high anti-inference capability and good system stability.
2. All Chinese human-computer interface,10-inch TFT touch panel, direct interface and easy for operation.
3. Automatic measurement by touch screen or foot switch.
4. It is accurate and convenient by automatic calibration, automatic scanning can be done for 10 times to get average value.
5. Meet different customers' requirements. Single-point,two-point and four-point measurement mode can be set.
6. It has measurement data printing function with USB data output interface.The data can be converted to Excel form and saved for management through the computer.
7. The Modularized circuit design for easy maintenance and repair.
8. Automatic shutter control. The shutter is turned on only when necessary to provide operator with maximum protection.
9. Customize all kinds of work tables and sample fixtures according to different samples to ensure measurement accuracy and convenience of use.
10. Automatic measurement of wafer and ingot can be done. It is applied to angle test during every processing step to increase conformity rate of the product.
Technical Target:
(1) X-ray Generator
Input Power:Single Phase AC 220V、50HZ、0.5KW
X-ray Tube:Cu Target Anode Grounding, Force Air Cooling
Tube Voltage:-30KVP,Switch closed under full voltage;
Tube Current:0~5mA, Continuous adjustable;
Frequency:Total frequency not over 0.5KW;
Protection:HV interlock、temperature protection、automatic shutter;
Statistic Inspection Accuracy:≤±10″
(Use standard quartz plate SIO2、1011 surface)(θ:13°20′)(2θ:26°40′)
(2) Angular Instrument:
Rotation angle of sample table:θ,0~+50°;
Rotation angle of reader:2θ,0°~+100°;
(3) Touching Screen:
Minimum value of angle:1″;
Digital display:Degree、Minute、Second
Angle adjustment:Digital displaying, can preset all angle value
(4) Record:
Counting tube:GJ5101Geiger tube, working voltage of 0~1100V .
Strength display;µA meter indicates crystal strength value.
(5) Outer dimension :1150(L)×650(W)×1500(H)
(6) Weight:Approximately 200Kg